Description
The tool file number exceeded the limit value. The tool number for internal control is 65 or more.
Subcode description
Causes and remedies
| Cause | Remedy |
|---|---|
| Software (malfunction) | 1. Reset the alarm and execute the job again. 2. If the alarm recurs, save CMOS.BIN and report the circumstances (operating procedure, etc.) to our service department. |