[Cause]
An abnormality occurred inside the laser oscillator.
[Countermeasure]
Check the simultaneously occurring FFL-025 and take action according to the laser oscillator operator's manual. If the problem persists, obtain an image backup using the error state recording function (Error State Recording in the auxiliary menu) and contact the service center before performing other operations, such as turning off power or jogging, after this alarm occurs. If the recording function is unavailable, record the conditions and operating steps leading up to the alarm, obtain an image backup, and contact the service center.