[Cause]
The beam interlock release request signal is OFF but the beam interlock release status signal is ON.
[Countermeasure]
Check the laser oscillator. If the problem persists after taking action, obtain an image backup using the error state recording function (Error State Recording in the auxiliary menu) and contact the service center before performing other operations, such as turning off power or jogging, after this alarm occurs. If the recording function is unavailable, record the conditions and operating steps leading up to the alarm, obtain an image backup, and contact the service center.