Description
An error occurred at corner-R execution.
Subcode description
Different tool numbers are set in
a Corner-R zone (for the Corner-
R middle step and end step).
Causes and remedies
| Cause | Remedy |
|---|---|
| Software (incorrect setting) | Use the same tool number when teaching the corner R section. |
| Other | If the alarm occurs again after implementing the countermeasures, contact our service department and describe the circumstances when CMOS.BIN was saved (operating procedure, etc.). |